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MS7812 Pressure Sensor Die (0-12 bar)

MS7812 Pressure Sensor Die (0-12 bar) - click to enlarge
MS7812 Pressure Sensor Die (0-12 bar)
Model Number: 

MS7812

Brand: 

INTERSEMA

Categories:  Intersema

Product Description:

Features
1) 0 to 12 bar range (174 PSI)
2) High linearity (0.05% typical)
3) Absolute or differential
4) Very Small Die size 2.1×1.96 mm
5) High Reliability, Low Cost

Applications
1) Engine controls
2) Diving computer

Description
The sensor element of the MS7812 consists of a small silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor MS7812A carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor MS7812D has a hole in the Pyrex? glass at the backside of the sensor.

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